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Physics » "Acoustic Waves - From Microdevices to Helioseismology", book edited by Marco G. Beghi, ISBN 978-953-307-572-3, Published: November 14, 2011 under CC BY 3.0 license. © The Author(s).

Chapter 25

Aluminum Nitride (AlN) Film Based Acoustic Devices: Material Synthesis and Device Fabrication

By Jyoti Prakash Kar and Gouranga Bose
DOI: 10.5772/20840