Open access peer-reviewed Edited Volume

Chemical Vapor Deposition for Nanotechnology

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Academic Editor

Pietro Mandracci

Polytechnic University of Turin

PublishedJanuary 10th, 2019

Doi10.5772/intechopen.73342

ISBN978-1-78984-961-5

Print ISBN978-1-78984-960-8

eBook (PDF) ISBN978-1-83881-732-9

Copyright year2019

Number of pages164

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Table of Contents

Open access  chapters

1. Spatial Atomic Layer Deposition

By David Muñoz-Rojas, Viet Huong Nguyen, César Masse de la Huerta, Carmen Jiménez and Daniel Bellet

1,912
9
2. Direct Liquid Injection Chemical Vapor Deposition

By Vincent Astié, Cyril Millon, Jean-Manuel Decams and Ausrine Bartasyte

2,131
2
2,331
8
1,776
3
1,267

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11,781 Total Chapter Downloads

25 Crossref Citations

25 Web of Science Citations

53 Dimensions Citations

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