Lithography, ISBN: 978-953-307-064-3
Computer Simulation of Processes at Electron and Ion Beam Lithography, Part 1: Exposure Modeling at Electron and Ion Beam Lithography
By Katia Vutova and Georgi Mladenov
DOI: 10.5772/8183
Published online: 01. February, 2010.
Published in print edition: February, 2010.
Fig. 1. Accumulated download share in the last six months. The time period is defined from the publication date up to today.
Fig. 2. Number of chapter downloads in the last six months by country. The countries represented are the TOP 5 countries from which this paper was accessed.
Fig. 3. Pie chart shows the download share by country. The countries represented are the TOP 5 countries from which this paper was accessed.
Downloads per country
| Country | Downloads |
|---|---|
| United States of America | 632 |
| China | 266 |
| India | 182 |
| Taiwan | 169 |
| Japan | 130 |
| Germany | 120 |
| Korea, Republic of | 95 |
| Russian Federation | 76 |
| France | 76 |
| United Kingdom | 72 |
| Canada | 67 |
| Poland | 52 |
| Italy | 52 |
| Slovenia | 46 |
| Croatia | 40 |
| Iran, Islamic Republic of | 40 |
| Turkey | 39 |
| Vietnam | 39 |
| Spain | 36 |
| Singapore | 36 |
| Indonesia | 35 |
| Brazil | 32 |
| Algeria | 30 |
| Netherlands | 27 |
| Romania | 27 |
| Egypt | 27 |
| Mexico | 26 |
| Malaysia | 24 |
| Belgium | 24 |
| Ireland | 24 |
| Austria | 23 |
| Australia | 21 |
| Europe | 19 |
| Sweden | 18 |
| Pakistan | 18 |
| Bulgaria | 17 |
| Asia/Pacific Region | 17 |
| Serbia | 17 |
| Greece | 17 |
| Thailand | 15 |
| Philippines | 14 |
| Portugal | 13 |
| Hong Kong | 12 |
| Argentina | 11 |
| Denmark | 10 |
| Ethiopia | 10 |
| Colombia | 10 |
| Israel | 10 |
| Czech Republic | 9 |
| New Zealand | 9 |
| Bangladesh | 8 |
| Slovakia | 8 |
| Ukraine | 8 |
| Syrian Arab Republic | 7 |
| Chile | 7 |
| Morocco | 6 |
| Switzerland | 6 |
| Saudi Arabia | 6 |
| Niue | 6 |
| South Africa | 6 |
| Nigeria | 6 |
| Hungary | 6 |
| Kenya | 5 |
| Norway | 5 |
| United Arab Emirates | 5 |
| Lithuania | 4 |
| Sierra Leone | 4 |
| Cameroon | 4 |
| Latvia | 4 |
| Peru | 4 |
| Jordan | 4 |
| Iraq | 4 |
| New Caledonia | 3 |
| Eritrea | 3 |
| Macedonia | 3 |
| Congo, Republic of the | 3 |
| Oman | 3 |
| Tonga | 3 |
| Albania | 3 |
| Namibia | 3 |
| Sri Lanka | 3 |
| Moldova | 3 |
| Georgia | 3 |
| Ghana | 3 |
| Uruguay | 3 |
| Tajikistan | 3 |
| Turks and Caicos Islands | 3 |
| Dominican Republic | 3 |
| Cambodia | 3 |
| Zimbabwe | 3 |
| Solomon Islands | 3 |
| Andorra | 3 |
| Rwanda | 3 |
| Martinique | 3 |
| Venezuela | 3 |
| Macau | 3 |
| Bolivia | 3 |
| Cyprus | 3 |
| Botswana | 3 |
| Holy See | 3 |
| Congo, Democratic Republic of the | 3 |
| Tunisia | 3 |
| Somalia | 3 |
| Estonia | 3 |
| Mali | 2 |
| Bosnia and Herzegovina | 2 |
| Saint Kitts and Nevis | 2 |
| Grenada | 2 |
| Honduras | 2 |
| Senegal | 2 |
| El Salvador | 2 |
| Azerbaijan | 2 |
| Montenegro | 2 |
| Chad | 2 |
| Sudan | 2 |
| Puerto Rico | 2 |
| Mozambique | 2 |
| Djibouti | 2 |
| Madagascar | 2 |
| Gambia | 2 |
| Jamaica | 2 |
| Saint Vincent and the Grenadines | 2 |
| Luxembourg | 2 |
| Seychelles | 2 |
| Belarus | 2 |
| Lebanon | 2 |
| Russia | 2 |
| Guinea | 2 |
| Belize | 2 |
| Trinidad and Tobago | 2 |
| Bahamas | 2 |
| Kuwait | 2 |
| Guyana | 2 |
| Cuba | 2 |
| Samoa | 2 |
| Niger | 2 |
| Ecuador | 2 |
| Lesotho | 2 |
| Costa Rica | 2 |
| Virgin Islands | 2 |
| Dominica | 1 |
| Finland | 1 |
| Benin | 1 |
| Monaco | 1 |
| Uzbekistan | 1 |
| Iran | 1 |
| Cayman Islands | 1 |
| Burkina Faso | 1 |
| Togo | 1 |
| Central African Republic | 1 |
| French Guiana | 1 |
| Malta | 1 |
| Fiji | 1 |
| Malawi | 1 |
| Reunion | 1 |
| Palestinian Territory | 1 |
| Bhutan | 1 |
| Angola | 1 |
| Haiti | 1 |
| Greenland | 1 |
| Iceland | 1 |
| Panama | 1 |
| Suriname | 1 |
| Uganda | 1 |
| Paraguay | 1 |
| Tanzania | 1 |
| Cape Verde | 1 |
| Barbados | 1 |
| Mongolia | 1 |
| Liechtenstein | 1 |
| Palestine | 1 |
| Syria | 1 |
| San Marino | 1 |
| Myanmar | 1 |
| Nicaragua | 1 |
| Papua New Guinea | 1 |
| Bahrain | 1 |
| Faroe Islands | 1 |
| Liberia | 1 |
| Korea, South | 1 |
| Zambia | 1 |
| Unknown | 426 |