Lithography,  ISBN: 978-953-307-064-3

Computer Simulation of Processes at Electron and Ion Beam Lithography, Part 1: Exposure Modeling at Electron and Ion Beam Lithography

By Katia Vutova and Georgi Mladenov

DOI: 10.5772/8183



Published online: 01. February, 2010.
Published in print edition: February, 2010.


Fig. 1. Accumulated download share in the last six months. The time period is defined from the publication date up to today.



Fig. 2. Number of chapter downloads in the last six months by country. The countries represented are the TOP 5 countries from which this paper was accessed.



Fig. 3. Pie chart shows the download share by country. The countries represented are the TOP 5 countries from which this paper was accessed.



Downloads per country


CountryDownloads
United States of America983
China308
India200
Taiwan180
Germany153
Japan151
Korea, Republic of115
Russian Federation111
France102
United Kingdom90
Canada74
Poland58
Italy57
Turkey50
Iran, Islamic Republic of49
Slovenia46
Spain45
Vietnam40
Croatia40
Singapore37
Indonesia35
Algeria35
Netherlands34
Brazil33
Lebanon32
Romania30
Asia/Pacific Region30
Mexico30
Egypt27
Ireland26
Malaysia26
Belgium25
Austria25
Australia22
Europe22
Sweden21
Pakistan20
Bulgaria18
Portugal18
Greece18
Serbia17
Israel16
Thailand16
Philippines14
Hong Kong13
Denmark12
Colombia11
Ukraine11
Argentina11
Czech Republic10
New Zealand10
Ethiopia10
Honduras9
Switzerland9
Slovakia9
Lithuania8
Bangladesh8
Chile7
Kenya7
Syrian Arab Republic7
Saudi Arabia7
United Arab Emirates6
Morocco6
Niue6
South Africa6
Nigeria6
Hungary6
Norway5
Iraq4
Peru4
Sierra Leone4
Cameroon4
Latvia4
Jordan4
Costa Rica3
Solomon Islands3
Andorra3
Estonia3
Albania3
Martinique3
Venezuela3
Tonga3
Somalia3
Uruguay3
Finland3
Botswana3
Bolivia3
Holy See3
Congo, Democratic Republic of the3
Turks and Caicos Islands3
Tunisia3
New Caledonia3
Eritrea3
Macedonia3
Bosnia and Herzegovina3
Congo, Republic of the3
Rwanda3
Oman3
Namibia3
Sri Lanka3
Macau3
Zimbabwe3
Moldova3
Georgia3
Ghana3
Tajikistan3
Cyprus3
Dominican Republic3
Cambodia3
Niger2
Mozambique2
Gambia2
Seychelles2
Grenada2
Belarus2
Russia2
Guinea2
Belize2
Trinidad and Tobago2
Bahamas2
Guyana2
Cuba2
Samoa2
Sudan2
Madagascar2
Lesotho2
Virgin Islands2
Kuwait2
Djibouti2
Mali2
Saint Vincent and the Grenadines2
Luxembourg2
Saint Kitts and Nevis2
Chad2
Senegal2
El Salvador2
Azerbaijan2
Jamaica2
Montenegro2
Ecuador2
Puerto Rico2
Barbados1
Greenland1
Liechtenstein1
Iceland1
Palestine1
Suriname1
Dominica1
Uganda1
Myanmar1
Tanzania1
Papua New Guinea1
Faroe Islands1
Mongolia1
Zambia1
Togo1
San Marino1
French Guiana1
Malawi1
Nicaragua1
Benin1
Monaco1
Liberia1
Korea, South1
Cayman Islands1
Burkina Faso1
Haiti1
Fiji1
Uzbekistan1
Iran1
Palestinian Territory1
Angola1
Central African Republic1
Malta1
Syria1
Panama1
Reunion1
Paraguay1
Bahrain1
Bhutan1
Cape Verde1
Unknown592