Open access

Wet Thermal Oxidation of GaAs and GaN

Written By

Ryszard Korbutowicz and Joanna Prazmowska

Published: 01 April 2010

DOI: 10.5772/8555

From the Edited Volume

Semiconductor Technologies

Edited by Jan Grym

Chapter metrics overview

5,121 Chapter Downloads

View Full Metrics

Written By

Ryszard Korbutowicz and Joanna Prazmowska

Published: 01 April 2010