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Implantation Damage Formation in GaN and ZnO

Written By

Katharina Lorenz and Elke Wendler

Submitted: 04 May 2011 Published: 30 May 2012

DOI: 10.5772/34751

From the Edited Volume

Ion Implantation

Edited by Mark Goorsky

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Written By

Katharina Lorenz and Elke Wendler

Submitted: 04 May 2011 Published: 30 May 2012