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Engineering » Electrical and Electronic Engineering » "Solid State Circuits Technologies", book edited by Jacobus W. Swart, ISBN 978-953-307-045-2, Published: January 1, 2010 under CC BY-NC-SA 3.0 license. © The Author(s).

Chapter 17

Sputtered AlN Thin Films for Piezoelectric MEMS Devices - FBAR Resonators and Accelerometers

By Friedel Gerfers, Peter M. Kohlstadt, Eyal Ginsburg, Ming Yuan He, Dean Samara-Rubio, Yiannos Manoli and Li-PengWang
DOI: 10.5772/6887