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Mechanical Properties of Amorphous Silicon Carbide

Written By

Kun Xue, Li-Sha Niu and Hui-Ji Shi

Submitted: 15 November 2010 Published: 10 October 2011

DOI: 10.5772/21689

From the Edited Volume

Silicon Carbide - Materials, Processing and Applications in Electronic Devices

Edited by Moumita Mukherjee

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Written By

Kun Xue, Li-Sha Niu and Hui-Ji Shi

Submitted: 15 November 2010 Published: 10 October 2011