Physical Sciences, Engineering and Technology > Engineering > Electrical and Electronic Engineering

Lithography

Edited by: Michael Wang

ISBN 978-953-307-064-3, Hard cover, 656 pages
Publisher: InTech
Publication date: February 2010
Subject: Electrical and Electronic Engineering

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Table of Contents

1. Direct Laser Lithography and Its Applications
   Hyug-Gyo Rhee
   995 views, 378 downloads
   
2. High Aspect Ratio Sloping and Curved Structures Fabricated by Proximity and UV-LED Backside Exposure
   Yoshinonori Matsumoto
   662 views, 419 downloads
   
3. Influence of Immersion Lithography on Wafer Edge Defectivity
   K. Jami, I. Pollentier, S. Vedula and G. Blumenstock
   736 views, 531 downloads
   
4. Femtosecond Laser Nonlinear Lithography
   Hiroaki Nishiyama and Yoshinori Hirata
   1152 views, 793 downloads
   
5. Improving the Efficiency of Pattern Extraction for Character Projection Lithography using OPC Optimization
   Hirokazu Nosato, Hidenori Sakanashi, Masahiro Murakawa and Tetsuya Higuchi
   772 views, 202 downloads
   
6. Manufacturing and Investigating Objective Lens for Ultrahigh Resolution Lithography Facilities
   N.I. Chkhalo, A.E. Pestov, N.N., Salashchenko and M.N. Toropov
   681 views, 367 downloads
   
7. Advances in Resist Materials and Processing Technology: Photonic Devices Fabricated by Direct Lithography of Resist/Colloidal Nanocrystals Blend
   Antonio Qualtieri, Tiziana Stomeo, Luigi Martiradonna, Roberto Cingolani and Massimo De Vittorio
   836 views, 369 downloads
   
8. A Method for Optical Proximity Correction of Thermal Processes: Orthogonal Functional Method
   Sang-Kon Kim
   831 views, 208 downloads
   
9. CO₂ Laser Produced Tin Plasma Light Source as the Solution for EUV Lithography
   Akira Endo
   893 views, 1212 downloads
   
10. Grazing Incidence Mirrors for EUV Lithography
    Mariana Braic, Mihai Balaceanu and Viorel Braic
    749 views, 434 downloads
    
11. Steady-State and Time-Dependent LPP Modeling
    White, Dunne, and O’Sullivan
    840 views, 276 downloads
    
12. Nano-Crystalline Diamond Films for X-ray Lithography Mask
    Linjun Wang, Jian Huang, Ke Tang and Yiben Xia
    773 views, 240 downloads
    
13. High-energy Electron Beam Lithography for Nanoscale Fabrication
    Cen Shawn Wu, Yoshiyuki Makiuchi and ChiiDong Chen
    922 views, 772 downloads
    
14. Optimal Design and Fabrication of Fine Diffractive Optical Elements Using Proximity Correction with Electron-Beam Lithography
    Masato Okano
    950 views, 371 downloads
    
15. Independent-Exposure Method in Electron-Beam Lithography
    Do-Kyun Woo and Sun-Kyu Lee
    813 views, 305 downloads
    
16. The Interdependence of Exposure and Development Conditions when Optimizing Low-Energy EBL for Nano-Scale Resolution
    Mohammad A. Mohammad, Taras Fito, Jiang Chen, Steven Buswell, Mirwais Aktary, Steven K. Dew and Maria Stepanova
    856 views, 294 downloads
    
17. Computer Simulation of Processes at Electron and Ion Beam Lithography, Part 1: Exposure Modeling at Electron and Ion Beam Lithography
    Katia Vutova and Georgi Mladenov
    843 views, 226 downloads
    
18. Computer Simulation of Processes at Electron and Ion Beam Lithography, Part 2: Simulation of Resist Developed Images at Electron and Ion Beam Lithography
    Katia Vutova, Elena Koleva and Georgy Mladenov
    772 views, 266 downloads
    
19. Soft Lithographic Fabrication of Micro Optic and Guided Wave Devices
    Angel Flores and Michael R. Wang
    788 views, 337 downloads
    
20. Application of Soft Lithography for Nano Functional Devices
    Shin-Won Kang
    969 views, 498 downloads
    
21. Fabrication of SiC-based Ceramic Microstructures from Preceramic Polymers with Sacrificial Templates and Softlithography Techniques
    Tae-Ho Yoon, Lan-Young Hong and Dong-Pyo Kim
    792 views, 594 downloads
    
22. Soft Lithography, a Tool to Address Single-Objects Investigations
    Aline Cerf and Christophe Vieu
    751 views, 173 downloads
    
23. Nanoimprint Lithography
    Hongbo Lan and Yucheng Ding
    978 views, 1513 downloads
    
24. Nanoimprint Lithography
    Thomas Glinsner and Gerald Kreindl
    790 views, 717 downloads
    
25. Effect of Applying Ultrasonic Vibration in Hot Embossing and Nanoimprint
    Harutaka Mekaru
    740 views, 257 downloads
    
26. Molecular Dynamics Study on Mold and Pattern Breakages in Nanoimprint Lithography
    Masaaki Yasuda, Kazuhiro Tada and Yoshihiko Hirai
    819 views, 272 downloads
    
27. Three Dimensional Nanoimprint Lithography Using Inorganic Electron Beam Resist
    Jun Taniguchi and Noriyuki Unno
    781 views, 290 downloads
    
28. Three-Dimensional Patterning Using Ultraviolet Nanoimprint Lithography
    Maan M. Alkaisi and Khairudin Mohamed
    771 views, 436 downloads
    
29. Metal Particle-Surface System for Plasmonic Lithography
    V. M. Murukeshan, K. V. Sreekanth and Jeun Kee Chua
    1073 views, 343 downloads
    
30. Nanosphere Lithography for Nitride Semiconductors
    Wai Yuen Fu and Hoi Wai Choi
    787 views, 606 downloads
    
31. Micro- and Nanopatterning of Surfaces Employing Self Assembly of Nanoparticles and Its Application in Biotechnology and Biomedical Engineering
    Claus Burkhardt, Kai Fuchsberger, Wilfried Nisch and Martin Stelzle
    869 views, 434 downloads
    
32. Strategies for High Resolution Patterning of Conducting Polymers
    Lin Jiang and Lifeng Chi
    789 views, 174 downloads