Robotics » Robotics Navigation » "Sensors: Focus on Tactile Force and Stress Sensors", book edited by Jose Gerardo Rocha and Senentxu Lanceros-Mendez, ISBN 978-953-7619-31-2, Published: December 1, 2008 under CC BY-NC-SA 3.0 license. © The Author(s).

Chapter 4

Three-Dimensional Silicon Smart Tactile Imager Using Large Deformation of Swollen Diaphragm with Integrated Piezoresistor Pixel Circuits

By Hidekuni Takao and Makoto Ishida
DOI: 10.5772/6616