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Robotics » Robotics Navigation » "Sensors: Focus on Tactile Force and Stress Sensors", book edited by Jose Gerardo Rocha and Senentxu Lanceros-Mendez, ISBN 978-953-7619-31-2, Published: December 1, 2008 under CC BY-NC-SA 3.0 license. © The Author(s).

Chapter 3

CMOS Force Sensor with Scanning Signal Process Circuit for Vertical Probe Card

By Jung-Tang Huang, Kuo-Yu Lee and Ming-Chieh Chiu
DOI: 10.5772/6615