Physics

Scanning Electron Microscopy

Edited by Viacheslav Kazmiruk, ISBN 978-953-51-0092-8, 842 pages, Publisher: InTech, Chapters published March 09, 2012 under CC BY 3.0 license
DOI: 10.5772/1973

Today, an individual would be hard-pressed to find any science field that does not employ methods and instruments based on the use of fine focused electron and ion beams. Well instrumented and supplemented with advanced methods and techniques, SEMs provide possibilities not only of surface imaging but quantitative measurement of object topologies, local electrophysical characteristics of semiconductor structures and performing elemental analysis. Moreover, a fine focused e-beam is widely used for the creation of micro and nanostructures. The book's approach covers both theoretical and practical issues related to scanning electron microscopy. The book has 41 chapters, divided into six sections: Instrumentation, Methodology, Biology, Medicine, Material Science, Nanostructured Materials for Electronic Industry, Thin Films, Membranes, Ceramic, Geoscience, and Mineralogy. Each chapter, written by different authors, is a complete work which presupposes that readers have some background knowledge on the subject.