Recent Advances in Nanofabrication Techniques and Applications, ISBN: 978-953-307-602-7

Emerging Maskless Nanolithography Based on Novel Diffraction Gratings

By Guanxiao Cheng, Yong Yang, Chao Hu, Ping Xu, Helun Song, Tingwen Xing and Max Q.-H. Meng

DOI: 10.5772/22265

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