Open access

Character Projection Lithography for Application-Specific Integrated Circuits

Written By

Makoto Sugihara

Submitted: 25 November 2010 Published: 02 December 2011

DOI: 10.5772/23269

From the Edited Volume

Recent Advances in Nanofabrication Techniques and Applications

Edited by Bo Cui

Chapter metrics overview

2,505 Chapter Downloads

View Full Metrics

Written By

Makoto Sugihara

Submitted: 25 November 2010 Published: 02 December 2011