Properties and Applications of Silicon Carbide, ISBN: 978-953-307-201-2

Low Temperature Chemical Vapour Deposition of Polycrystalline Silicon Carbide Film Using Monomethylsilane Gas

By Hitoshi Habuka

DOI: 10.5772/14635

Download as PDF

May 16, 2012 | International AIDS Vaccine Day - Pushing Towards Advancing Research Efforts in the Field
May 11, 2012 | InTech Sponsors Champion Volleyball Team
May 07, 2012 | InTech Sponsors ICRA 2012
Apr 26, 2012 | InTech Attends Symposium on Neuroprotection and Neurorepair
Apr 23, 2012 | InTech's Books Donated to Central Library of the Autonomous University of Baja California
Apr 20, 2012 | International Journal of Engineering Business Management Enters Scopus
Apr 18, 2012 | Exosomics Journal Editor-in-Chief to Attend ISEV 2012
Apr 17, 2012 | Haemophilia: the Bleeding Gene
Apr 12, 2012 | International Day of Human Spaceflight: Introducing the Humans vs. Robots Galactic Battleship
Apr 05, 2012 | InTech is Attending the Eurobiotech 2012 Agriculture Symposium in Turkey