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Materials Science » Ceramics » "Piezoelectric Ceramics", book edited by Ernesto Suaste-Gomez, ISBN 978-953-307-122-0, Published: October 5, 2010 under CC BY-NC-SA 3.0 license. © The Author(s).

Chapter 1

Piezoelectric Thin Film Deposition: Novel Self-Assembled Island Structures and Low Temperature Processes on Silicon

By Sharath Sriram, Madhu Bhaskaran and Arnan Mitchell
DOI: 10.5772/9937