Open access

Thermal Microactuators

Written By

Leslie M. Phinney, Michael S. Baker and Justin R. Serrano

Submitted: 23 February 2011 Published: 28 March 2012

DOI: 10.5772/28006

From the Edited Volume

Microelectromechanical Systems and Devices

Edited by Nazmul Islam

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Written By

Leslie M. Phinney, Michael S. Baker and Justin R. Serrano

Submitted: 23 February 2011 Published: 28 March 2012