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Optical-Thermal Phenomena in Polycrystalline Silicon MEMS During Laser Irradiation

Written By

Justin R. Serrano and Leslie M. Phinney

Submitted: 28 February 2011 Published: 28 March 2012

DOI: 10.5772/28424

From the Edited Volume

Microelectromechanical Systems and Devices

Edited by Nazmul Islam

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Written By

Justin R. Serrano and Leslie M. Phinney

Submitted: 28 February 2011 Published: 28 March 2012