Open access

Macromodels of Micro-Electro-Mechanical Systems (MEMS)

Written By

Anatoly Petrenko

Submitted: 11 February 2011 Published: 28 March 2012

DOI: 10.5772/26812

From the Edited Volume

Microelectromechanical Systems and Devices

Edited by Nazmul Islam

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Written By

Anatoly Petrenko

Submitted: 11 February 2011 Published: 28 March 2012