Open access

Acoustic Wave Based MEMS Devices, Development and Applications

Written By

Ioana Voiculescu and Anis N. Nordin

Submitted: 25 February 2011 Published: 28 March 2012

DOI: 10.5772/28214

From the Edited Volume

Microelectromechanical Systems and Devices

Edited by Nazmul Islam

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Written By

Ioana Voiculescu and Anis N. Nordin

Submitted: 25 February 2011 Published: 28 March 2012