Open access

Fabrication of High Aspect Ratio Microcoils for Electromagnetic Actuators

Written By

Daiji Noda, Masaru Setomoto and Tadashi Hattori

Published: 01 December 2009

DOI: 10.5772/7008

From the Edited Volume

Micro Electronic and Mechanical Systems

Edited by Kenichi Takahata

Chapter metrics overview

2,635 Chapter Downloads

View Full Metrics

Written By

Daiji Noda, Masaru Setomoto and Tadashi Hattori

Published: 01 December 2009