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This book is indexed in
Micro Electronic and Mechanical Systems
Edited by Kenichi Takahata, ISBN 978-953-307-027-8, Hard cover, 386 pages, Publisher: InTech, Chapters published December 01, 2009 under CC BY-NC-SA 3.0 license
This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.