Engineering » Industrial Engineering and Management » "Manufacturing System", book edited by Faieza Abdul Aziz, ISBN 978-953-51-0530-5, Published: May 16, 2012 under CC BY 3.0 license. © The Author(s).
Particle Reduction at Metal Deposition Process in Wafer Fabrication
By Faieza Abdul Aziz, Izham Hazizi Ahmad, Norzima Zulkifli and Rosnah Mohd. Yusuff