InTech uses cookies to offer you the best online experience. By continuing to use our site, you agree to our Privacy Policy.

Engineering » Electrical and Electronic Engineering » "Lithography", book edited by Michael Wang, ISBN 978-953-307-064-3, Published: February 1, 2010 under CC BY-NC-SA 3.0 license. © The Author(s).

Chapter 8

A Method for Optical Proximity Correction of Thermal Processes: Orthogonal Functional Method

By Sang-Kon Kim
DOI: 10.5772/8174