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Nitridation of GaAs Surface by Low Energy Ion Implantation with In Situ Control of Chemical Composition

Written By

Valery Mikoushkin

Submitted: 05 May 2011 Published: 30 May 2012

DOI: 10.5772/34863

From the Edited Volume

Ion Implantation

Edited by Mark Goorsky

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Written By

Valery Mikoushkin

Submitted: 05 May 2011 Published: 30 May 2012