Materials Science » Semiconductors » "Ion Implantation", book edited by Mark Goorsky, ISBN 978-953-51-0634-0, Published: May 30, 2012 under CC BY 3.0 license

Chapter 11

Implantation Damage Formation in GaN and ZnO

By Katharina Lorenz and Elke Wendler
DOI: 10.5772/34751