Materials Science » Semiconductors » "Ion Implantation", book edited by Mark Goorsky, ISBN 978-953-51-0634-0, Published: May 30, 2012 under CC BY 3.0 license

Chapter 1

High-Resolution Ion Implantation from keV to MeV

By Sébastien Pezzagna and Jan Meijer
DOI: 10.5772/34601