Open access peer-reviewed Edited Volume

Ion Implantation

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Academic Editor

Mark Goorsky
Mark Goorsky

University of California Los Angeles,
United States of America

Published30 May 2012

Doi10.5772/1881

ISBN978-953-51-0634-0

eBook (PDF) ISBN978-953-51-4292-8

Copyright year2012

Number of pages450

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Table of Contents

Open access  chapters

1. High-Resolution Ion Implantation from keV to MeV

By Sébastien Pezzagna and Jan Meijer

3,843
4
2. Radio Frequency Quadrupole Accelerator: A High Energy and High Current Implanter

By Yuancun Nie, Yuanrong Lu, Xueqing Yan and Jiaer Chen

3,229
1,841
5. Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage

By Denis Shamiryan and Dmitriy V. Likhachev

3,272
3
11. Implantation Damage Formation in GaN and ZnO

By Katharina Lorenz and Elke Wendler

2,673
1
12. Optical Waveguides Fabricated by Ion Implantation/Irradiation: A Review Optical Waveguides Fabricated by Ion Implantation/Irradiation: A Review

By Ovidio Peña-Rodríguez, José Olivares, Mercedes Carrascosa, Ángel García-Cabañes, Antonio Rivera and Fernando Agulló-López

3,018
6
13. Ga3+ Focused Ion Beam for Piezo Electric Nano Structuration Fabrication

By D. Rémiens, D. Deresmes, D. Troadec and J. Costecalde

2,353
15. Annealing Effects on the Particle Formation and the Optical Response

By Akira Ueda, Richard R. Mu and Warren E. Collins

2,071
3,648
1

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45,369 Total Chapter Downloads

2,099 Total Chapter Views

48 Crossref Citations

107 Web of Science Citations

100 Dimensions Citations

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