Open access

Micromachined Arrayed Capacitive Ultrasonic Sensor/Transmitter with Parylene Diaphragms

Written By

Seiji Aoyagi

Published: 01 January 2010

DOI: 10.5772/6888

From the Edited Volume

Solid State Circuits Technologies

Edited by Jacobus W. Swart

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Written By

Seiji Aoyagi

Published: 01 January 2010