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Cathodo- and Photo- Luminescence of Silicon Rich Oxide Films Obtained by LPCVD

Written By

Rosa López-Estopier, Mariano Aceves-Mijares and Ciro Falcony

Submitted: 05 May 2011 Published: 28 March 2012

DOI: 10.5772/34888

From the Edited Volume

Cathodoluminescence

Edited by Naoki Yamamoto

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Written By

Rosa López-Estopier, Mariano Aceves-Mijares and Ciro Falcony

Submitted: 05 May 2011 Published: 28 March 2012