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Design of Circular Dammann Grating: Fabrication and Analysis

Written By

Fung Jacky Wen and Po Sheun Chung

Submitted: 17 November 2010 Published: 09 November 2011

DOI: 10.5772/22054

From the Edited Volume

Advances in Unconventional Lithography

Edited by Gorgi Kostovski

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Written By

Fung Jacky Wen and Po Sheun Chung

Submitted: 17 November 2010 Published: 09 November 2011