Open access

Surface Acoustic Waves and Nano–Electromechanical Systems

Written By

Dustin J. Kreft and Robert H. Blick

Submitted: 05 November 2010 Published: 14 November 2011

DOI: 10.5772/19927

From the Edited Volume

Acoustic Waves - From Microdevices to Helioseismology

Edited by Marco G. Beghi

Chapter metrics overview

3,394 Chapter Downloads

View Full Metrics

Written By

Dustin J. Kreft and Robert H. Blick

Submitted: 05 November 2010 Published: 14 November 2011