Metal Gate Electrode and High-Dielectrics for Sub-32nm Bulk CMOS Technology: Integrating Lanthanum Oxide Capping Layer for Low Threshold-Voltage Devices Application HongYu Yu

Source: Solid State Circuits Technologies
ISBN 978-953-307-045-2
Edited by: Jacobus W. Swart
Publisher: InTech, January 2010
Usage: 930 views, 404 downloads

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